| Chemical | Country share | Dominant | Sev |
|---|---|---|---|
| ABF Resin | JP 95% |
Japan | 5 |
| EUV Photoresist | JP 91% |
Japan | 4 |
| 12N UHP HF | JP 85% KR |
Japan | 4 |
| CNT Pellicle | FI 85% JP |
Finland | 4 |
| Spherical Silica | JP 85% |
Japan | 3 |
| EUV PAG | JP 70% DE |
Japan | 4 |
| LiPF₆ | CN 55% JP |
China | 3 |
| NF₃ | KR 50% JP 45% |
S. Korea | 4 |
| UF₆ | US 45% RU* 35% FR |
US | 5 |
| PFPE Fluid | BE 40% US 30% JP |
Belgium | 4 |